>> P.57
GaugeBlocksStepMasterSERIES516•Stepmasterisamastergageofdifferentheightthatisusefulforthez-axis(verticaldirection)calibrationofopticalinstruments.•Eachadjacentstepismeasureddownto0.01µmbyusingainterferometerwithin±0.20µmallowance.•Steelandceramictypesareavailable.Steeltype516-199Ceramictype516-499SPECIFICATIONSSteeltypeCodeNo.BlockNo.Cumulativestep(µm)Stepvaluebetweenadjacentblocks(µm)CeramictypeCodeNo.BlockNo.Cumulativestep(µm)Stepvaluebetweenadjacentblocks(µm)1010516-1983152101052516-4983152101052518518417417111010516-19934002300445054703001005020516-49934002300445054703001005020Note:○○○-○○○-24:ProvidedwithCalibrationCerticate01-30Unit:mmR0.2orlessBlockNo.Adjacentstep2615Magnifiedviewofstep(Max.height)6DIMENSIONS123453001005020µm7777745Stepvaluebetweenadjacentblocks12345516-198,516-498516-199,516-499No.1-210µm300µmNo.2-35µm100µmNo.3-42µm50µmNo.4-51µm20µm
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